2015 International Symposium on VLSI Technology, Systems and Application

Low power CMOS and embedded memory Foundry technology RF process, device and integration technology Stand alone memory: DRAM, FLASH, emerging memories Advanced CMOS modules: e.g; gate stack, strained Si, SiGe substrates, interconnect technology, etc. Lithography: directed self assembly, EUV, multiple patterning, etc. Power and analog IC device and technology Advanced CMOS: Ge, SiGe, III-V process and devices Process and device modeling TFT and organic electronics MEMS , imagers and sensors Advanced manufacturing technology, yield, reliability and test 3D ICs and advanced packaging Photonics Energy scavenging technology